Method for providing a perpendicular magnetic recording transducer using a low energy mill
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United States of America Patent
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Jun 11, 2013
Grant Date -
Nov 17, 2011
app pub date -
May 11, 2010
filing date -
May 11, 2010
priority date (Note) -
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Abstract
A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.
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