Conveyor robot
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United States of America Patent
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Jun 11, 2013
Grant Date -
Dec 23, 2010
app pub date -
Feb 20, 2009
filing date -
Feb 27, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A conveyor robot (10) includes a main body (12), a first arm (18), and a second arm (16). The first arm (18) is designed to be reciprocable between a wafer cassette and a position above the main body (12). The first arm (18) is provided with a first hand (182) having a plurality of gripping portions designed to grip a wafer. The second arm (16) is designed to be reciprocable between a position above the main body (12) and a wafer stage. The second arm (16) is provided with a second hand (162) having a plurality of gripping portions designed to grip the wafer from a different angle than do the gripping portions of the first hand (182). The gripping portions of the first hand (182) and those of the second hand (162) are positioned at equal height.
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