High-throughput CVD system
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United States of America Patent
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Jun 11, 2013
Grant Date -
Mar 18, 2010
app pub date -
Sep 15, 2009
filing date -
Sep 15, 2008
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Abstract
The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.
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