Light emitting device with air bars and method of manufacturing the same
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United States of America Patent
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Jun 11, 2013
Grant Date -
Jul 1, 2010
app pub date -
Dec 29, 2009
filing date -
Dec 30, 2008
priority date (Note) -
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Abstract
Disclosed are a light emitting device having at least one air bar capable of improving light extracting efficiency and a method of manufacturing the same. With the present invention, there is provided a method of manufacturing a light emitting device including a semiconductor layer(s) having an air-bar layer(s) with a plurality of air bars. The method includes at least one process cycle for forming the semiconductor layer(s). The process cycle includes: forming a patterning thin-film layer on a substrate or a thin-film layer; forming on the patterning thin-film layer an etching guide pattern and an air-bar pattern connected to the etching guide pattern; forming a semiconductor layer(s) on the patterns and exposing the etching guide pattern; wet-etch the exposed etching guide pattern by using a wet-etching solution; and etch the air-bar pattern connected to the etching guide pattern.
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