Magneto-impedance sensor element and method for manufacturing the same
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United States of America Patent
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Jun 11, 2013
Grant Date -
Dec 1, 2011
app pub date -
Feb 27, 2009
filing date -
Feb 27, 2009
priority date (Note) -
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Abstract
A magneto-impedance sensor element is formed in a planar type structure in which an amorphous wire is incorporated in a substrate. The magneto-impedance sensor element includes a nonmagnetic substrate, an amorphous wire arranged in an aligning direction of a planar pattern that forms a detecting coil, a spiral detecting coil formed of a planar pattern and a cubic pattern on an outer periphery of the amorphous wire, a planar insulating portion that insulates the planar pattern from the amorphous wire, a wire fixing portion to fix the amorphous wire on an upper surface of the planar insulating portion, and a cubic insulating portion that insulates the cubic pattern from the amorphous wire.
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