Illumination optical system, exposure apparatus, and device manufacturing method
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United States of America Patent
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Jun 11, 2013
Grant Date -
Apr 16, 2009
app pub date -
Oct 15, 2008
filing date -
Oct 16, 2007
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Abstract
An illumination optical system for illuminating an irradiated plane M with illumination light provided from a light source includes a spatial light modulator, which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser, which is arranged at an incidence side of the spatial light modulator through which the illumination light enters.
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