Manufacturing method for electrooptic element and optical deflector including electrooptic element
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United States of America Patent
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Jun 11, 2013
Grant Date -
Mar 15, 2012
app pub date -
Sep 7, 2011
filing date -
Sep 13, 2010
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Abstract
An electrooptic element includes an optical waveguide layer made from a ferroelectric material and having a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face, and an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively, in which the ferroelectric material is magnesium-oxide-doped lithium niobate, and at least one of the optical incidence face and the optical exit face of the optical waveguide layer is formed in parallel with a crystal face of the ferroelectric material.
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