Reclaim chemistry
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 18, 2013
Grant Date -
N/A
app pub date -
Mar 30, 2007
filing date -
Mar 30, 2007
priority date (Note) -
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Abstract
Systems, apparatus and methods are provided for efficiently reclaiming solvents used to clean surfaces of semiconductor wafers, etc. More particularly, embodiments of the present invention provide a reclaim approach that prevents the evaporation of chemical solvents used to process wafers using proximity heads, by confining hot liquid solvents used to form fluid menisci on the wafer surface with cold liquid solvents of the same chemical composition.
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