Resonant accelerometer with low sensitivity to package stress
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United States of America Patent
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Jun 25, 2013
Grant Date -
Oct 15, 2009
app pub date -
Apr 14, 2008
filing date -
Apr 14, 2008
priority date (Note) -
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Abstract
A resonant accelerometer (24) includes a single anchor (28) fixed to a substrate (32). A proof mass (34) is positioned above a surface (30) of the substrate (32) and is positioned symmetrically about the anchor (28). The proof mass (34) has a central opening (38). Each of a number of suspension beams (42, 44, 46, 48) resides in the central opening (38) and has one end (50) affixed to the anchor (28) and another end (52) attached to an inner peripheral wall (40) of the proof mass (34). A resonant frequency of the beams (42, 44) in a direction (64) aligned with a common axis (58) of the beams (42, 44) changes according to acceleration in the direction (64). A resonant frequency of the beams (46, 48) in a direction (66) aligned with a common axis (62) of the beams (46, 48) changes according to acceleration in the direction (66).
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