Polysilicon control etch back indicator

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United States of America Patent

PATENT NO 8471368
SERIAL NO

13431551

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Abstract

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This invention discloses a semiconductor wafer for manufacturing electronic circuit thereon. The semiconductor substrate further includes an etch-back indicator that includes trenches of different sizes having polysilicon filled in the trenches and then completely removed from some of the trenches of greater planar trench dimensions and the polysilicon still remaining in a bottom portion in some of the trenches having smaller planar trench dimensions.

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Patent Owner(s)

Patent OwnerAddress
ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED475 OAKMEAD PARKWAY SUNNYVALE CA 94085

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Hong Cupertino, US 114 1356
Li, Tiesheng San Jose, US 69 667
Tai, Sung-Shan San Jose, US 51 809
Wang, Yu Fremont, US 1481 8143

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