Driving switches of a plasma load power supply
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United States of America Patent
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Jul 9, 2013
Grant Date -
Jul 8, 2010
app pub date -
Jan 14, 2010
filing date -
Jul 23, 2007
priority date (Note) -
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Abstract
Operation of a plasma supply device having at least one switching bridge with at least two switching elements, and configured to deliver a high frequency output signal having a power of >500 W and a substantially constant fundamental frequency >3 MHz to a plasma load is accomplished by determining at least one operating parameter, at least one environmental parameter of at least one switching element and/or a switching bridge parameter, determining individual drive signals for the switching elements taking into account the at least one operating parameter, the at least one environmental parameter and/or the switching bridge parameter, and individually driving the switching elements with a respective drive signal.
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