Surface measurement instrument
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United States of America Patent
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Jul 16, 2013
Grant Date -
Jul 7, 2011
app pub date -
Jan 18, 2011
filing date -
Feb 10, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A surface measurement instrument for obtaining surface characteristic data of a sample surface is described. Relative movement between a reference surface and a sample support is caused to occur while a sensor senses light intensity at intervals along a scan path to provide a series of intensity values representing interference fringes produced by a region of a sample surface during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support can be both tilted to cause the scan path to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
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