Method for testing a test substrate under defined thermal conditions and thermally conditionable prober
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United States of America Patent
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Jul 30, 2013
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app pub date -
Oct 1, 2008
filing date -
Oct 10, 2007
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Abstract
In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
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