Method and apparatus for providing active compliance in a probe card assembly

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United States of America Patent

PATENT NO 8513965
APP PUB NO 20110043240A1
SERIAL NO

12938164

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Abstract

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A probe card assembly can comprise a first source of compliance and a second source of compliance. The probe card assembly can further comprise a controller, which can be configured to apportion a total compliance demand placed on the probe card assembly between the first source of compliance and the second source of compliance.

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Patent Owner(s)

  • FORMFACTOR, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Breinlinger, Keith J San Ramon, US 47 698

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