Vacuum processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8523138
APP PUB NO 20120111668A1
SERIAL NO

13346381

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Abstract

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A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shindo, Takehiro Nirasaki, JP 43 1034

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