Method and device for cleaning substrates on a carrier
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United States of America Patent
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Sep 3, 2013
Grant Date -
May 17, 2012
app pub date -
Jan 20, 2012
filing date -
Jul 23, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
In the case of a device and a method for cleaning substrates on a carrier, to the underside of which the substrates are fastened so as to be parallel to and slightly apart from one another, the carrier has in its interior a plurality of longitudinal channels, which run parallel to one another. As a result of the sawing of the wafers, they merge, via openings, into interstices between the substrates. As a result of a relative movement, an elongate tube, from which cleaning fluid is let out, is introduced into one of the longitudinal channels, the relative movement being achieved substantially through moving of the carrier.
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