Loading device and sputtering device using same
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United States of America Patent
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Sep 3, 2013
Grant Date -
Jun 28, 2012
app pub date -
Apr 21, 2011
filing date -
Dec 24, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A sputtering device includes a main body and a loading device received in the main body. The main body includes a top portion, a bottom portion, and a sidewall connected between the top portion and the bottom portion, an upper bearing mounted on the top portion, and a lower bearing mounted on the bottom portion. The loading device includes an outer frame, an inner frame received in the outer frame, and a gear device arranged between the outer frame and the in inner frame. The outer frame is rotatably connected to the upper bearing and includes a plurality of first rods arranged in a first circle. The inner frame is rotatably connected to the lower bearing and includes a plurality of second rods arranged in a second circle. The gear device is configured for bringing the outer frame and the inner frame to rotate in opposite directions.
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