Abrasive cleaning agent, method for manufacturing the same, and method for polishing using abrasive cleaning agent
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United States of America Patent
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Sep 10, 2013
Grant Date -
Mar 12, 2009
app pub date -
Jun 19, 2008
filing date -
Jun 20, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
An abrasive cleaning agent is provided which can be used for a polishing process for polishing a surface of a workpiece to form a mirror surface, which suppresses generation of static electricity and adhesion of stains to the workpiece, which decreases a crushing ratio, and which has a low environmental burden when the abrasive cleaning agent is disposed of. The above abrasive cleaning agent includes an elastic material containing a soluble nitrogen substance as a primary component, which is obtained from tubers of devil's tongue and which contains mannan as a primary component, and a 10% to 30% of water; and 1 to 30 percent by weight, with respect to the elastic material, of abrasive grains of size #220 or less, which are supported on surfaces of the elastic material and/or are buried therein, so that the grain diameter on the whole is in the range of 88 to 1,190 μm.
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