Low volatility polymers for two-stage deposition processes
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United States of America Patent
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Sep 10, 2013
Grant Date -
Jan 17, 2008
app pub date -
Apr 30, 2007
filing date -
May 1, 2006
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Abstract
This invention relates to materials and processes for the preparation of high quality layers, for example for the fabrication of optical devices such as waveguides. In particular, the invention relates to the use of low volatility polymer materials for the deposition of high quality layers on large area substrates via a two-stage process, for example extrude-and-spin.
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