Star polymer and coupling agent for anionic polymerization

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United States of America Patent

PATENT NO 8536280
APP PUB NO 20100056748A1
SERIAL NO

12461861

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Abstract

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[PROBLEM] To provide a novel star polymer useful as resist materials with high sensitivity and high resolution, and a novel coupling agent for anionic polymerization for synthesizing the polymer.

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Patent Owner(s)

Patent OwnerAddress
TOHO CHEMICAL INDUSTRY CO LTD6-4 AKASHI-CHO CHUO-KU TOKYO 1040044 ?1040044

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yano, Katsuhiko Yokosuka, JP 11 194

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