Electron beam source and method of manufacturing the same

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United States of America Patent

PATENT NO 8536773
APP PUB NO 20120248959A1
SERIAL NO

13075325

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Abstract

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An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.

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Patent Owner(s)

  • CARL ZEISS MICROSCOPY GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buehler, Wolfram Hermaringen, DE 9 31
Drexel, Volker Koenigsbronn, DE 14 272

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