Multipurpose acidic, organic solvent based microelectronic cleaning composition
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United States of America Patent
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Oct 15, 2013
Grant Date -
Dec 15, 2011
app pub date -
Jan 14, 2010
filing date -
Feb 25, 2009
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Abstract
A cleaning composition for cleaning microelectronic or nanoelectronic devices, the cleaning composition having HF as the sole acid and sole fluoride compound in the composition, at least one primary solvent selected from the group consisting of sulfones and selenones, at least one polyhydroxyl alkyl or aryl alcohol co-solvent having metal ion complexing or binding sites, and water, and optionally at least one phosphonic acid corrosion inhibitor compound and the is free of amines, bases and other salts.
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