Fabry-perot optical sensor and method of manufacturing the same
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United States of America Patent
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Oct 15, 2013
Grant Date -
Jul 3, 2008
app pub date -
Mar 2, 2006
filing date -
Mar 2, 2005
priority date (Note) -
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Abstract
A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.
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