Pre-aligned thermionic emission assembly
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United States of America Patent
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Nov 12, 2013
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N/A
app pub date -
Feb 25, 2011
filing date -
Feb 25, 2011
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Abstract
A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The interface thermally isolates the Wehnelt cap from the anode to allow the cathode to rapidly reach the sufficiently high temperature to emit the beam of electrons.
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