Method of designing an application specific probe card test system
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United States of America Patent
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Nov 12, 2013
Grant Date -
Dec 7, 2006
app pub date -
Jun 13, 2006
filing date -
Apr 21, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A method is provided for design and programming of a probe card with an on-board programmable controller in a wafer test system. Consideration of introduction of the programmable controller is included in a CAD wafer layout and probe card design process. The CAD design is further loaded into the programmable controller, such as an FPGA to program it: (1) to control direction of signals to particular ICs, even during the test process (2) to generate test vector signals to provide to the ICs, and (3) to receive test signals and process test results from the received signals. In some embodiments, burn-in only testing is provided to limit test system circuitry needed so that with a programmable controller on the probe card, text equipment external to the probe card can be eliminated or significantly reduced from conventional test equipment.
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