Method and apparatus for automatic measurement of pad geometry and inspection thereof

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United States of America Patent

PATENT NO 8588511
APP PUB NO 20080144917A1
SERIAL NO

11613087

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Abstract

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An image of a semiconductor interconnection pad is analyzed to determine a geometric description of the zone regions of a multiple zone semiconductor interconnection pad. Edge detection machine vision tools are used to extract features in the image. The extracted features are analyzed to derive geometric descriptions of the zone regions of the pad, that are applied in semiconductor device inspection, fabrication, and assembly operations.

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Patent Owner(s)

  • COGNEX CORPORATION;COGNEX TECHNOLOGY AND INVESTMENT LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Gang Framingham, US 575 5539
Michael, David J Wayland, US 76 1488
Wallack, Aaron S Natick, US 42 1320

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