Evaporator with internal restriction

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United States of America Patent

PATENT NO 8590338
APP PUB NO 20110154854A1
SERIAL NO

12650586

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Abstract

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An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boesch, Damien Mountain View, US 12 39
Rosenblum, Martin Menlo Park, US 3 4

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