FOUP opener and operating method thereof
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United States of America Patent
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Nov 26, 2013
Grant Date -
Aug 4, 2011
app pub date -
Feb 4, 2011
filing date -
Feb 4, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening window in a port plate for separating the interior and exterior of a semiconductor processing device, and a dock unit for positioning the FOUP in a FOUP door attachment/detachment position. A suction disc mechanism and a lock mechanism for fixing the FOUP door to a FOUP main body and releasing the FOUP door are disposed on the port door. A FOUP door detection sensor for determining whether or not the FOUP door fixed to the FOUP main body, which is positioned in the FOUP door attachment/detachment position on the dock unit, is attached correctly to an opening portion of the FOUP main body is disposed on the port plate.
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Cited Art Landscape
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