Integrated cleaner and dryer system
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United States of America Patent
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Nov 26, 2013
Grant Date -
Dec 23, 2010
app pub date -
Jun 17, 2010
filing date -
Jun 17, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.
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