Aluminum nitride sintered body
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United States of America Patent
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Dec 3, 2013
Grant Date -
Feb 12, 2009
app pub date -
Aug 4, 2006
filing date -
Aug 11, 2005
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Abstract
Provided is an aluminum nitride sintered body with high optical transmissivity and which has a smooth surface in the unpolished condition after firing. The aluminum nitride sintered body has an oxygen concentration of 450 ppm or less, a concentration of impurity elements excluding oxygen, nitrogen, and aluminum of 350 ppm or less, and an average crystal grain diameter of between 2 μm and 20 μm, and also has an arithmetic mean surface height Ra of 1 μm or less and a maximum height Rz of 10 μm or less in the unpolished condition after firing.
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