Charged particle beam processing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8598542
APP PUB NO 20100224592A1
SERIAL NO

12719619

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Abstract

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Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Jong Alan Frank Eindhoven, NL 8 65
Henstra, Alexander Utrecht, NL 57 344
Mulders, Johannes Jacobus Lambertus Eindhoven, NL 15 147
Toth, Milos Portland, US 31 420
Young, Richard J Beaverton, US 16 185

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