Coating device and coating method
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United States of America Patent
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Dec 31, 2013
Grant Date -
Nov 25, 2010
app pub date -
May 10, 2010
filing date -
May 22, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A coating device includes a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of a substrate while rotating the substrate; and an adjusting mechanism which adjusts the coating state of the liquid material at the outer periphery of the substrate; wherein the adjusting mechanism includes a dip portion which dips the outer periphery of the substrate in a solution while rotating the substrate and dissolves; and a suction portion which suctions the vicinity of the outer periphery of the substrate after dipping in the solution.
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