Mobility measuring apparatus, method therefor, and resistivity measuring apparatus and method therefor
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United States of America Patent
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Dec 31, 2013
Grant Date -
Mar 10, 2011
app pub date -
Aug 31, 2010
filing date -
Sep 4, 2009
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Abstract
A mobility measuring apparatus includes a storage unit that respectively stores a relationship between the mobility μ of carriers in a semiconductor and a decay constant γ of the carriers and a relationship between a reflectivity R of the semiconductor to a terahertz light and the decay constant γ of the carriers, a light radiating unit that radiates a terahertz light to the semiconductor as a sample, a detecting unit that detects a reflected light of the sample to the radiated terahertz light, a reflectivity calculating unit that calculates the reflectivity Rexp of the sample by determining a ratio of an intensity of the reflected light relative to an intensity of the radiated terahertz light, an obtaining unit that obtains the decay constant γexp of the sample corresponding to the reflectivity Rexp of the sample by making reference to the stored relationship between the reflectivity R and the decay constant γ of the carriers, and a mobility calculating unit that calculates the mobility μexp of the sample from the stored relationship between the mobility μ and the decay constant γ on the basis of the obtained decay constant γexp.
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