Scroll pump with isolation barrier

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United States of America Patent

PATENT NO 8622724
APP PUB NO 20110076172A1
SERIAL NO

12567625

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Abstract

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Scroll pumping apparatus includes a first scroll element and a second scroll element; a drive mechanism operatively coupled to the second scroll element for producing orbiting motion of the second scroll element relative to the first scroll element, the drive mechanism having an axis of rotation; and an isolation element to isolate a first volume and a second volume in the scroll pumping apparatus. The isolation element includes a first resilient annular member coupled, directly or indirectly, to the first scroll element, a second resilient annular member coupled, directly or indirectly, to the second scroll element, and a tubular member coupled between the first and second annular members.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INC5301 STEVENS CREEK BLVD MS 1A-PB SANTA CLARA CA 95051-7201

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boudreau, Ronald Bernard Boxborough, US 1 3
Calhoun, John Lexington, US 22 89
Filip, Romeo Boris Framingham, US 1 3

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