Gas injector and film deposition apparatus having the same
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United States of America Patent
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Jan 14, 2014
Grant Date -
Jul 2, 2009
app pub date -
Dec 27, 2008
filing date -
Dec 31, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.
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