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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
EXOGENESIS CORPORATION	BILLERICA MASSACHUSETTS 01821

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kirkpatrick, Allen R	Carlisle, US	28	635
Kirkpatrick, Sean R	Littleton, US	60	404

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 23, 2025

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 23, 2014	US,20140021343,A1   US20140021343A1	FIRST PUBLISHED PATENT APPLICATION
January 14, 2014	US,8629393,B1   US8629393B1	GRANTED PATENT AS FIRST PUBLICATION

Full Text

US Patent No: 8629393

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

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