Polishing head and polishing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8636561
APP PUB NO 20110136414A1
SERIAL NO

13056249

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Abstract

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A polishing head for holding a workpiece when a surface of the workpiece is polished and a polishing apparatus provided with the polishing head, and more particularly a polishing head for holding the workpiece on a rubber film and a polishing apparatus provided with the polishing head. The polishing head and the polishing apparatus provided with the polishing head that can adjust the polishing profile on the basis of the shape of the workpiece before polishing and can stably obtain good flatness.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU HANDOTAI CO LTD2-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO
FUJIKOSHI MACHINERY CORP1650 KIYONO MATSUSHIRO-MACHI NAGANO-SHI NAGANO 381-1233

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arakawa, Satoru Nagano, JP 11 56
Hashimoto, Hiromasa Nishishirakawa, JP 64 984
Kishida, Hiromi Nagano, JP 11 28
Masumura, Hisashi Nishishirakawa, JP 44 582
Morita, Kouji Nishishirakawa, JP 40 262

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