Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases
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United States of America Patent
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Feb 4, 2014
Grant Date -
Aug 9, 2012
app pub date -
Apr 3, 2012
filing date -
May 18, 2006
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Abstract
A cathode electrode for plasma generation. The cathode is made of graphite with highly ordered structure such as Pyrolitic Graphite or Carbon-Carbon composites. Furthermore, carbon containing gases will be used as plasma gas. The cathode will allow for theoretically an unlimited lifetime of the cathode.
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