Integrated gripper for workpiece transfer

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United States of America Patent

PATENT NO 8651539
SERIAL NO

13740257

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.

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Patent Owner(s)

Patent OwnerAddress
BROOKS AUTOMATION US LLC15 ELIZABETH DRIVE CHELMSFORD MA 01824

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rebstock, Lutz Gaienhofen, DE 82 494

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