Method and apparatus for processing metal bearing gases

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United States of America

PATENT NO 8658936
SERIAL NO

13336616

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Abstract

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A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Xing Lexington, US 193 4664
Holber, William M Winchester, US 44 2976
Smith, Donald K Belmont, US 68 2674
Smith, John A North Andover, US 43 911

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