Systems and methods for forming apertures in microfeature workpieces
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United States of America Patent
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Mar 4, 2014
Issued Date -
N/A
app pub date -
May 1, 2006
filing date -
May 5, 2004
priority date (Note) -
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Abstract
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece.
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