Spectral purity filter and lithographic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8665420
APP PUB NO 20110149262A1
SERIAL NO

13060581

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Abstract

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A spectral purity filter is configured to reflect extreme ultraviolet radiation. The spectral purity filter includes a substrate, and an anti-reflective coating on a top surface of the substrate. The anti-reflective coating is configured to transmit infrared radiation. The filter also includes a multi-layer stack configured to reflect extreme ultraviolet radiation and to substantially transmit infrared radiation.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Soer, Wouter Anthon Nijmegen, NL 59 251
Van, Herpen Maarten Marinus Johannes Wilhelmus Heesch, NL 136 980

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