Method and device for examining a laser system
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United States of America Patent
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Mar 4, 2014
Grant Date -
Aug 16, 2012
app pub date -
Nov 9, 2009
filing date -
Nov 9, 2009
priority date (Note) -
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Abstract
A method for analyzing a laser system, which has a focused laser beam and a controllable deflection assembly for controlling the transverse and/or longitudinal position of the beam focus, said method comprising the steps of directing the laser beam or a partial beam branched therefrom downstream of the deflection assembly toward an optically nonlinear medium for the purpose of generating frequency multiplied radiation, the wavelength of which corresponds to an uneven higher harmonic of the wavelength of the laser beam, activating the deflection assembly, and measuring a power of the frequency multiplied radiation while the deflection assembly is activated. The conversion efficiency of the nonlinear process by which the frequency multiplied radiation is produced is dependent upon the focusability of the laser beam. By evaluating the measured power of the frequency multiplied radiation, dynamic impairments of focusability can be detected, which can be caused by inertia-induced deformations of optical scan components of the laser system.
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