Ammonium sulfide passivation of semiconductors

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Mar 18, 2014
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Apr 13, 2011
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Apr 13, 2011

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Abstract

The present invention includes methods directed to improved processes for producing a monolayer of sulfur on the surface of a semiconductor. As a surface layer, it functions to passivate the surface; if annealed, it provides a doping element.

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Patent Owner	Address
SEMATECH INC	2706 MONTOPOLIS DRIVE A DELAWARE CORPORATION AUSTIN TX 78741

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Barnett, Joel Myron	Austin, US	1	4
Hill, Richard James William	Austin, US	1	4

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Ammonium sulfide passivation of semiconductors

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United States of America Patent

13086009

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 18, 2014	US,8673746,B2 US8673746B2	GRANTED PATENT AS SECOND PUBLICATION
October 18, 2012	US,20120264309,A1 US20120264309A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	8673746
SERIAL NO	13086009
DOCKET NO

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13086009

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