Thermal measurements using multiple frequency atomic force microscopy

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United States of America Patent

PATENT NO 8677809
APP PUB NO 20110154546A1
SERIAL NO

12925442

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Abstract

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Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.

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Patent Owner(s)

  • OXFORD INSTRUMENTS AFM INC;OXFORD INSTRUMENTS PLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gannepalli, Anil Goleta, US 5 33
Proksch, Roger Santa Barbara, US 56 349

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