Flow sensing device and packaging thereof

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United States of America Patent

PATENT NO 8677818
APP PUB NO 20120161256A1
SERIAL NO

13255579

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Abstract

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There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base.

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Patent Owner(s)

Patent OwnerAddress
SENSORTECHNICS GMBH82178 PUCHHEIM

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frolov, Gennadiy Montreal, CA 17 109
Grudin, Oleg Montreal, CA 33 167
Landsberger, Leslie M Montreal, CA 26 164
Saed, Salman Montreal, CA 3 11

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