Integrated torsional-microbalance device in MEMS technology and fabrication process thereof
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United States of America Patent
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Mar 25, 2014
Grant Date -
Apr 4, 2013
app pub date -
Sep 14, 2012
filing date -
Dec 9, 2008
priority date (Note) -
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Abstract
A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.
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