Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

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United States of America Patent

PATENT NO 8678563
APP PUB NO 20130141495A1
SERIAL NO

13690359

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Abstract

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An electrode is provided with a lanthanum nickelate film which is formed through a chemical solution deposition method using a lanthanum nickelate film forming composition which is obtained by heating a mixed solution obtained by mixing at least lanthanum acetate, nickel acetate, acetic acid, and water, a piezoelectric layer is provided on the lanthanum nickelate film and is formed of a complex oxide having a perovskite structure which contains at least Pb, Ti, and Zr, and a half-width (θ) of a peak derived from a (100) plane and/or a peak derived from a (001) plane measured using an X-ray rocking curve method is 6.0 degrees or less.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itayama, Yasuhiro Chino, JP 27 45

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