Piezoelectric element, method for manufacturing the same, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus
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United States of America Patent
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Mar 25, 2014
Grant Date -
Sep 29, 2011
app pub date -
Mar 23, 2011
filing date -
Mar 26, 2010
priority date (Note) -
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Abstract
A piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode. The first electrode includes a first electroconductive layer having a first surface at the piezoelectric layer side and a second electroconductive layer having a second surface at the first surface side. The second electroconductive layer mainly contains lanthanum nickelate and is disposed on the first surface. The first electrode, the piezoelectric layer and the second electrode overlap with each other when viewed in the direction of the normal to the first surface to form an overlap portion acting as a driving portion. At least part of the second electroconductive layer is disposed within the sides of the first surface within the driving portion, and the second surface has a smaller area than the first surface within the driving portion.
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