Method and apparatus for preparing specimens for microscopy
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United States of America Patent
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Mar 25, 2014
Grant Date -
Jun 10, 2004
app pub date -
Aug 1, 2003
filing date -
Aug 2, 2002
priority date (Note) -
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Abstract
An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
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